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Auger Electron Spectroscopy (AES)

Category Product Testing, Characterization & Forensic Lab Services
Test Auger Electron Spectroscopy (AES)

JAMP-10s scanning Auger microprobe with thin-window EDXA

Auger electron spectroscopy (AES)  is a unique surface analysis tool that is sensitive to the elemtnts in the top two-to-three atomic layers on a surface.  At LA Testing, AES has been used in a wide array of services for our clients.
Applications included:

  • Elemental concentration depth profile
  • Thin films analysis
  • Contamination study
  • Corrosion and oxidation study
  • Metallurgical analysis (surface/grain boundaries)
  • Failure Analysis

Instrumentation:  Scanning Auger microscope equipped with sputtering ion gun and EDX attachment.

The figure below presents an AES spectrum of ZnO thin film showing Cl contamination.

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